NanoMatrix is currently working with manufacturers of MEMS/NEMS, photonic devices, and optical equipment to solve problems inherent in fabricating products with feature sizes that are often smaller than the wavelengths of visible light. Our proprietary, environmentally friendly technology addresses the need for advanced surface preparation with capabilities for drilling, precision cutting, etching, and pattern development on a nanoscale.


Small-Scale Fabrication

We have developed a new approach to performing small-scale fabrication. By providing precise control of microscopic and nanoscopic, supersonic jets of liquid, NanoMatrix delivers a prototyping and manufacturing capability that will "supply and enable many new industrial processes" in the high-growth field of nanotechnology. Currently, we can control the high-energy liquid jets to cut and shape features below 50 nanometers in size. At the scale at which we are working, the jet's stream of individual molecules produces a precision machining effect.

NanoMatrix products and processes are applicable in any industry that requires micro and nanomachining. Manufacturers' needs for micro and nanomachining are expanding rapidly. We offer a new solution as well as a new capability in manufacturing. We can machine specific geometries for sensors, medical devices, and dielectrics; prepare surfaces for adhesion, and replace certain lithography processes in semiconductors with both lower cost and higher yields. We work with clients to develop new applications for expanding markets, as well as improve existing applications by helping reduce manufacturing costs for current applications.


Our Solution

NanoMatrix provides a much-needed solution for industrial applications and research and development labs throughout the world. A tool that is specifically developed for small runs and rapid prototyping, as well as larger operations, and that operates without reliance on chemical processes or high-energy fields is desired but not currently available. In response to these growing needs, NanoMatrix has developed a purely mechanical process that requires minimal setup and no harsh chemicals, vacuums, or high-energy fields. The process is tolerant of contaminants and can be used in environments with less stringent cleanliness controls. It is also much safer than most other processes and much more cost-effective for the majority of applications.

Currently available methods of making micro and nanoscale prototypes (MEMS and NEMS) require thousands of dollars and weeks or even months of development, resulting in costly delays. Furthermore, technologies that use atomic force microscopes (AFMs) for scraping or moving materials on a substrate are not usually very cost-effective when the costs of training, environment, and maintenance—such as frequent replacement of expensive tips—are considered. In contrast, the NanoMatrix products/processes provide rapid and low-cost fabrication of prototype devices and equipment. Our products will become indispensable to a large population of researchers and product developers in not only nanotechnology applications but in a wide variety of scientific, industrial, and business applications. Our current focus is on the scale between 25 and 250 nanometers, although NanoMatrix's processes have micron capabilities.

Although NanoMatrix can replace many current lithography and e-beam processes, the NanoMatrix technology also adds totally new capabilities that will make available new applications for a variety of new materials that were not previously possible. Because we use a mechanical process, NanoMatrix can machine smaller feature sizes in a theoretically unlimited range of materials. We are able to drill micro and nano holes according to the client's needs. For example, a client might want holes of a specific size, and in a specific pattern, on a specific material. Most requests from clients are about machining materials that are not semiconductor materials.

The NanoMatrix tools are self-contained units that require only a power supply. The system is a compact, desktop device that provides on-site, sub-micron rapid fabrication capability for individual research efforts, enabling individuals to reduce the time required to develop prototypes from months to days. Larger production volume systems are under development.

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